100nm Confocal Displacement Sensor with 12mm Reference

SFS-D5012L is a spectral confocal displacement sensor with 12 mm reference distance, ±2.5 mm measuring range, 100 nm repeatability, <±1 μm linearity error and a low temperature drift of <0.02% F.S./°C.

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Product Overview

POMEAS SFS-D5012L is a high-precision spectral confocal displacement sensor with a 12 mm reference distance, ±2.5 mm measuring range, 100 nm repeatability and <±1 μm linearity error, with a temperature characteristic of <0.02% F.S./°C. Compared with the 6.75 mm D5007, the 12 mm reference distance provides more mounting and travel clearance; the Φ12×94.6 mm probe weighs about 37 g.

SFS-D5012L spectral confocal displacement sensor

Key Features

100 nm repeatability, linearity error <±1 μm
Temperature drift <0.02% F.S./°C, lowest in the series
±2.5 mm measuring range, 5 mm total travel
12 mm reference distance for ample clearance
Φ12×94.6 mm probe, only 37 g
Φ19 μm spot, ±13° measuring angle
Minimum measurable thickness 10% F.S., IP40

Technical Specifications

Product Model	SFS-D5012L
Sensor Type	Chromatic Confocal Displacement Sensor
Reference Distance	12 mm
Measuring Range	±2.5 mm
Measuring Angle	±13°
Spot Diameter	Φ19 μm
Repeatability	100 nm
Linearity Error	<±1 μm
Probe Size	Φ12×94.6 mm
Weight	37 g
Minimum Measurable Thickness	10% of F.S.
Temperature Characteristic	<0.02% F.S./°C
Protection Rating	IP40
Measurement Method	Non-contact Optical Measurement
Application	Displacement, Thickness and Surface Contour Measurement

Applications

Ideal for precision part displacement and height measurement, transparent material thickness measurement, temperature-drift-sensitive inline inspection and surface contour scanning where working distance matters.

SFS-D5012L application

FAQ

How does the SFS-D5012L differ from the SFS-D5007?

Probe size, precision, range and low-drift characteristics are identical; the difference is reference distance: 12 mm for the D5012L vs 6.75 mm for the D5007. Choose by fixturing space and working distance.

What is the repeatability?

Repeatability is 100 nm with a linearity error of <±1 μm and a temperature characteristic of <0.02% F.S./°C.

What applications is it suitable for?

Precision displacement and height measurement, transparent material thickness measurement, temperature-drift-sensitive inline inspection and surface contour scanning.