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Production Center: No.68, Yongwei Road, Baizhoubian, Dongcheng District, Dongguan, China,523000
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NA 0.34, 29.5 mm working distance, 0.8 μm resolution, infinity corrected
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400 mm infinity tube lens, φ20 mm entrance pupil, coaxial illumination
φ6 mm field · ±0.03 µm repeatability · ±0.2 µm position accuracy · 35 µs exposure
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φ15 mm field · ±0.05 µm repeatability · ±0.3 µm position accuracy · 35 µs exposure
φ40 mm field · ±0.08 µm repeatability · ±1.0 µm position accuracy · 35 µs exposure
φ65 mm field · ±0.1 µm repeatability · ±1.2 µm position accuracy · 35 µs exposure
φ120 mm field · ±0.2 µm repeatability · ±2.5 µm position accuracy · 35 µs exposure
0.3–30 mm range · ±2 µm accuracy · ±0.15 µm repeatability · 2400 samples/s
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